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| Large Stage IC Inspection Microscope
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| Reflected and transmitted light illuminator for Inspection of large wafer and photomarks in the IC industry. The microscopes is equipped with a large size mechanical stage, smooth movement of ball bearing guides having low coaxial controls for x-y movement.
Objectives
M5x-M10x, M20x and M50x.
Eye pieces
WF10x and WF 15x.
Magnification
50x to 750x. |
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